High efficient reticle cleaning equipment
For 6012 and 6025 reticle
Two sets of led cold light
Angle is slightly adjustable
Air suction device. The location for air suction is adjustabe to suit different height of Pellicle protection frame.
1. Pour anhydrous alcohol.
2. Rolling particle on pellicle.
3. Eliminate anhydrous alcohol hoover by air suction device. Complete pellicle cleaning process.
特許番号
中国特許番号:CN207457699U
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