High efficient reticle wiping equipment with electron microscope / 電子顕微鏡を備えた高効率のレチクルワイピング装置

High efficient reticle wiping equipment with electron microscope
For 6025 reticle.
Pellicle cover avoid particle contamination.
Limit switch avoid cover from colliding pellicle.
Two sets of led cold light. Adjustable focal length and luminance.
2 sets of handle for wiping. Press down handle for wiping reticle. Easy to change dust free stick.
Insert microscope into wiping machne. Check particle instantly through monitor. Digital zoom in.