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| ● Product name：6" Teflon Cassette / PFA Cassette |
| ● Part number：PF-C150-T |
| ● Dimension：177(L) x 145(W) x 173(H)mm |
| ● Weight：860g |
| ● Capacity：12 PCS |
| ● Apply for round wafer：6 inch (Ø150mm) |
| ● Material：Teflon / PFA |
| ● Slot Pitch：9.525mm |
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| PFA Cassette / Teflon Cassette, Capacitor of wafer can be customized and designed by customers’ request, able to resist strong acid, strong hydrofluoric acid, strong base and heat up to 200~220℃, use to deliver wafers in acid & base process of Fabrication factory. |
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| PFA Cassette / Teflon Cassette 8"、12" 13 slot |
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| ● Choose Cassette： |
| Material |
Degree of temperature resistance |
Property |
Application |
| PFA Cassette |
200~220℃ |
Strong acid, strong hydrofluoric acid, strong base resistant |
For acid& base process |
| PP Cassette |
40~60℃ |
Pros: Light weight, able to welding
Cons: Distort easily |
For general transfer process |
| PEEK Cassette |
120℃ |
High hardness, not easy to distort, high temperature resistant |
| PC Cassette |
80~100℃ |
Light weight, able to welding |
| PEI Cassette |
130~150℃ |
Wear resistant, anti-static |
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| ● Able to do laser engraving、Able to install RFID. Keep the track of carrier and material. |
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PFA Cassette / Teflon Cassette
Able to install RFID |
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PFA Cassette / Teflon Cassette
Cassette Able to do laser engraving |
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