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| FOUP (200mm / 8 inch)

 
FOUP
Products Specification
● Product name:FOUP
● Part number:CK213
● Dimension:252.5(L) x 224.2(W) x 213(H)mm
● Weight:2930g
● Capacity:13 pcs
● Apply for round wafer:200mm(8 inch)Wafer
● Material:Customized
● Slot pitch:12.7 mm
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Products Description
200mm FOUP, Able to protect, deliver and store 200mm wafer, provide safe protection during delivery and storage. Reduce particle contamination of wafer, protect wafer from static electricity damage and then increase yield rate. Support AMHS function, size comply with SEMI standard, provide high cleanliness to wafer loading and automation solution.
FOUP FOUP
Product Feature
Patent No.:
Taiwanese Patent No.:I586597、M563421、M588109、M628876、M625383、M654854
Chinese Patent No.:CN204348693U、CN205609490U、 CN206259327U、CN208007736U、CN210654281U 、CN210654281U
Korea Patent No.:20-0486265
Related Products
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12" 13 slot M type FOUP
 
FOUP Door key
12" 25 slot FOUP   12" 13 slot C type FOUP   12" 13 slot M type FOUP   FOUP Door key
 
 
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